if all vacuum lines are good and electrical ground point on the back of engine (VSV uses it) is tight and clean, then try this:
DIY : EGR Valve removal
note, you will need a small 6'' crest wrench (adjustable) if you are going to remove valve together with exhaust pipe section (bolts to that pipe very often break off or strip).
you will also need 2 gaskets to manifold, get them from dealer.
my valve didn't survive the cleaning, or rather disassemble, so I had to get a new one, revised design (black top), no more trouble with EGR (I had intermittent power loss upon acceleration). old valve was terribly sticky and rusty and squeaky.