I have your car. you probably know by now there is no IAC valve to clean so that isn't it. I tried cleaning my egr once, still on the car, for preventative but not sure i accomplished anything, i think you'd want to disconnect it to soak it good in solvent.
You're on the right track, sounds like it might be an egr valve problem - they can go bad gradually and still never even turn on the CEL. Cleaning the EGR is worth a try before buying a new one because they are $214 (napaonline).
The usual quick and dirty way to test the EGR is to idle the engine, then reach under the valve and push up against the membrane - the idle should change. If it does not, your egr valve may be bad.
http://www.napaonline.com/Search/Det...+50070+2070002
I've never cleaned the EGR properly but maybe a search will find a post by somebody who has.
also try cleaning the MAF sensor (carefully, its delicate - dont touch just spray).
also notice the little device that controls your butterfly inside the throttle body area, the horse-shoe shaped plastic thing - its a little electric motor not sure what he is called. This part could be bad also as it affects idle. It can be adjusted if you're desperate, (pm me if you want to try it and i will tell you how), but it's probably better to just test it - (im not sure how but i know it can be done with a VOM)