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First thing I'd do is clean the MAF sensor carefully with MAF specific cleaner (to be safe). Reset the CEL and see if it comes back. Probably would be a good idea to clean the throttlebody out as well - same with the PCV valve. Pull the plugs out and read the ends - note any significant differences between the plugs. Make sure the air filter is in good shape and there are no cracks/damage to the airbox (make sure there is a possible seal with the clips engaged) and hose running to the throttlebody doesn't have any rips/cracks in the ribbed tubing.
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2002 Corolla S, 1.8L 1ZZ-FE VVT-i
2003 Matrix XRS, 1.8L 2ZZ-GE, VVTL-i (RIP)
2009 Matrix XRS, 2.4L 2AZ-FE VVT-i
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