Honestly, all three are pretty good choices. Toyota is still probably more reliable, especially for long run. Subaru maintenance costs tend to creep up as they get older. While Subaru's long term reliability is pretty good, you will find more instances of wheel bearing failures, oil leaks from valve covers, cooling system problems, etc. than most Toyotas. Subaru has addressed some of the most serious problems (head gasket failures with older models and oil consumption of the latest generation). Toyota is designed to last loner, with more substantial parts and over better quality of materials. You can get a good idea by looking underneath a 3 years old RAV4 and a Subaru in any location where salt is used in the winter. The difference will be obvious - Toyota's exhaust will be pretty "shiny", with little signs of corrosion. Subaru's exhaust will be mostly rusted because they use a lower quality steel, and it will probably need a full replacement 6-7 years after initial purchase. Another example is to ask a local suspension alignment store about how many Toyotas and Subarus they see that require frequent alignment. Most Toyotas will handle typical potholes and occasional encounters with curbs pretty well, and rarely need alignment unless subject to very harsh conditions or until suspension components are worn out. Subarus are much more prone to suffer from alignment problem even under pretty normal driving conditions. These differences also explain why Subarus are lighter - an Outback which is significantly bigger than a RAV has essentially the same curb weight. A Forester, almost identical in size to a RAV, is much lighter. Toyota is more conservative in their design, and sizes critical component such as suspension, bearings, etc. for a longer lifespan.
The biggest advantage of Subaru is pricing. They cost significantly less than a Toyota (for comparably equipped model). You get a nicer, more luxurious vehicle with the Outback for basically the same price as RAV4. Or you can get a more spartan vehicle for way less money with the Forester. But you get what you pay for, as mentioned above.
If you intend to keep the car for 5-6 years / 100k miles or less, than Toyota's longevity advantage is probably not worthy the extra money. If on the other hand, you want to keep you maintenance costs low beyond 100k miles, than Toyota is a better choice. The additional maintenance / repair cost as the Subaru gets older will easily offset the initial price difference.